Thermo Scientific Helios G4 PFIB SEM

The 4th generation of electron microscope “Thermo Scientific Helios G4 PFIB CXe” can be found in our laboratory, which is suitable widely for academic and industrial project as well. Extreme high resolution (<0.6 nm) is available with the Schottky field emission cathode. The Xenon inductively coupled plasma focused ion beam is unique in Hungary and in Middle-East Europe (only in the University of Miskolc), which is capable in-situ large area (hundreds of microns) sample preparation. After sample preparation, 2D and 3D high quality analysis is available. TEM samples can be checked in STEM mode.

• Correlative laser cutting (Trumpf UV laser /355 nm) possibility, which was developed for our laboratory
• Integrated EDAX EDS and EBSD detectors with full software package
• Xeon-plasma gun
• Platinum (Pt) and carbon (C) deposition
• STEM detector
• Integrated plasma cleaner

Features:

Electron gun: Schottky field emission cathode

• Acceleration voltage: 350 V – 30 kV
• Beam current: 0.8 pA – 100 nA
• Resolution:
• 2-15 kV: 0.6 nm
• 1 kV: 0.7 nm
• 500 V: 1 nm
• 350V: 1.1 nm

Stage: high-precision 110*110 mm 5-axes eucentric, variable sample holders

• Moving:
• x and y: 110 mm
• z: 65 mm
• rotation: 360°
• tilt: -15°and +90°
• Maximum 2 kg (0.5 kg) sample

Detectors:

• Everhart-Thonley SE detector
• Seconder electron and ion (ICE) detector
• Elstar In-column detector
• EDAX EDS detector (30 mm², resolution 127 eV on MnKα measured)
• EDAX EBSD detector
• STEM detector (BF, DF and HAADF)

Plasma beam: Xenon plasma

• acceleration voltage: 2-30 kV
• beam current: 1.5 pA – 2.5 µA

EasyLift LT Nanomanipulator

Precursor gases (5 port, witch 2 have cooling possibility): Pt and C